Heterostructure for an optoelectronic device

ABSTRACT

A heterostructure, such as a group III nitride heterostructure, for use in an optoelectronic device is described. The heterostructure can include a sacrificial layer, which is located on a substrate structure. The sacrificial layer can be at least partially decomposed using a laser. The substrate structure can be completely removed from the heterostructure or remain attached thereto. One or more additional solutions for detaching the substrate structure from the heterostructure can be utilized. The heterostructure can undergo additional processing to form the optoelectronic device.

REFERENCE TO RELATED APPLICATIONS

The current application is a continuation of U.S. patent applicationSer. No. 16/012,943, filed on 20 Jun. 2018, which claims the benefit ofU.S. Provisional Application No. 62/522,251, filed on 20 Jun. 2017, andis a continuation-in-part of U.S. patent application Ser. No.15/200,575, filed on 1 Jul. 2016, which claims the benefit of U.S.Provisional Application No. 62/187,707, filed on 1 Jul. 2015, each ofwhich are hereby incorporated by reference.

TECHNICAL FIELD

The disclosure relates generally to semiconductor fabrication, and moreparticularly, to laser-based removal of a substrate structure.

BACKGROUND ART

Substrates including one or more epitaxially grown group III nitridesemiconductor layers are frequently used for fabricating a wide varietyof semiconductor structures and devices including, for example,integrated circuit (IC) devices (for example, logic processors andmemory devices), radiation-emitting devices (for example, light emittingdiodes (LEDs), resonant cavity light-emitting diodes (RCLEDs), verticalcavity surface emitting lasers (VCSELs), laser diodes), radiationsensing devices (for example, optical sensors), and electronic devicesutilized in power control systems.

For growing group III nitride semiconductor structures, lattice mismatchsubstrates are typically used as it is currently expensive to producehigh quality bulk semiconductor substrates such as bulk GaN and bulk AlNsubstrates. In many instances, sapphire is used as a lattice mismatchedsubstrate. Other substrates include semiconductor materials such as, forexample, silicon (Si), silicon carbide (SiC), III-V type semiconductormaterials, and other substrates known in the art.

Individual semiconductor structures (e.g., dies or wafers) may berelatively thin and difficult to handle with equipment for processingthe semiconductor structures. Thus, so-called “carrier” dies or wafersmay be attached to the actual semiconductor structures including theactive and passive components of operative semiconductor devices. Thecarrier dies or wafers do not typically include any active or passivecomponents of a semiconductor device to be formed. Such carrier dies andwafers are referred to herein as “carrier substrates.” The carriersubstrates increase an overall thickness of the semiconductor structuresand facilitate handling of the semiconductor structures (e.g., byproviding structural support to the relatively thinner semiconductorstructures) by processing equipment used to process the active and/orpassive components in the semiconductor structures attached thereto thatwill include the active and passive components of a semiconductor deviceto be fabricated thereon.

Laser lift-off may be used to separate portions of substrates during thefabrication of semiconductor structures. For example, in an illustrativeapproach, an epitaxial layer may be grown on a first substrate, andindividual chips may be formed in the epitaxial layer. A secondsubstrate may be bonded to the epitaxial layer. A laser heats the firstsubstrate and releases it from the epitaxial layer. The individual chipsremain attached to the second substrate.

SUMMARY OF THE INVENTION

Aspects of the invention provide a solution for fabricating aheterostructure, such as a group III nitride heterostructure, for use inan optoelectronic device. The heterostructure can be epitaxially grownon a sacrificial layer, which is located on a substrate structure. Thesacrificial layer can be at least partially decomposed using a laser.The substrate structure can be completely removed from theheterostructure or remain attached thereto. One or more additionalsolutions for detaching the substrate structure from the heterostructurecan be utilized. The heterostructure can undergo additional processingto form the optoelectronic device.

A first aspect of the invention provides a method of fabricating a groupIII nitride heterostructure, the method comprising: epitaxially growinga sacrificial layer over a substrate structure; epitaxially growing thegroup III nitride heterostructure directly on the sacrificial layer; anddecomposing the sacrificial layer by irradiating the sacrificial layerwith a laser to at least partially release the group III nitrideheterostructure from the substrate structure.

A second aspect of the invention provides a method of fabricating anoptoelectronic device, the method comprising: epitaxially growing asacrificial layer over a substrate structure; epitaxially growing thegroup III nitride heterostructure directly on the sacrificial layer,wherein the group III nitride heterostructure includes an active regionfor the optoelectronic device; and decomposing the sacrificial layer byirradiating the sacrificial layer with a laser to at least partiallyrelease the group III nitride heterostructure from the substratestructure.

A third aspect of the invention provides a method of fabricating anoptoelectronic device, the method comprising: epitaxially growing asacrificial layer over a substrate structure; epitaxially growing thegroup III nitride heterostructure directly on the sacrificial layer,wherein the group III nitride heterostructure includes an active regionfor the optoelectronic device; and at least partially decomposing thesacrificial layer by irradiating the sacrificial layer with a laser toat least partially release the group III nitride heterostructure fromthe substrate structure.

The illustrative aspects of the invention are designed to solve one ormore of the problems herein described and/or one or more other problemsnot discussed.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other features of the disclosure will be more readilyunderstood from the following detailed description of the variousaspects of the invention taken in conjunction with the accompanyingdrawings that depict various aspects of the invention.

FIGS. 1A and 1B illustrate fabrication of a group III nitrideheterostructure according to an embodiment.

FIGS. 2A and 2B show illustrative sacrificial layers with laterallyvarying compositions according to embodiments.

FIG. 3 shows schematics of illustrative compositional fluctuations of asacrificial layer according to an embodiment.

FIGS. 4A and 4B show illustrative growth heterostructures includingcomposite sacrificial layers according to embodiments.

FIGS. 5A and 5B show an illustrative process for growing columnarstructures according to an embodiment, while FIG. 5C shows anillustrative columnar structure including multiple sub-layers accordingto an embodiment.

FIG. 6 shows a top view of laterally inhomogeneous columnar structureslocated within a masking material according to an embodiment.

FIG. 7 shows an illustrative sacrificial layer including multiplesub-layers according to an embodiment.

FIGS. 8A and 8B show an illustrative growth structure and top substratestructure layer according to an embodiment.

FIG. 9 shows a portion of a growth structure including a top substratestructure layer that is patterned.

FIGS. 10A-10F show illustrative process steps for fabricating a devicefrom a growth structure according to an embodiment.

FIGS. 11A and 11B illustrate the relationship between the wavelength,absorption coefficient, and aluminum content of an AlGaN material.

FIGS. 12A and 12B show illustrative schematics for using electricalcurrent for separating a substrate structure from a group III nitrideheterostructure according to embodiments.

FIGS. 13A and 13B show an illustrative removal processes including laserdecomposition combined with a mechanical force according to embodiments.

FIGS. 14A and 14B show illustrative device structures after partialablation of the sacrificial layer according to embodiments.

FIGS. 15A and 15B show side and top views of an illustrative growthstructure according to an embodiment.

FIG. 16 shows impact areas for two illustrative laser beams according toembodiments.

FIG. 17 shows an illustrative growth structure, which includes twosacrificial layers according to an embodiment.

FIG. 18 shows an illustrative embodiment in which the substrate isthinned prior to lift-off according to an embodiment.

FIG. 19 shows a schematic structure of an illustrative optoelectronicdevice fabricated from a group III nitride heterostructure according toan embodiment.

FIG. 20 shows an illustrative contact formed on an exposed surface of acontact layer according to an embodiment.

FIG. 21 shows an illustrative growth structure according to anembodiment.

FIG. 22 shows an illustrative flow diagram for fabricating a circuitaccording to an embodiment.

It is noted that the drawings may not be to scale. The drawings areintended to depict only typical aspects of the invention, and thereforeshould not be considered as limiting the scope of the invention. In thedrawings, like numbering represents like elements between the drawings.

DETAILED DESCRIPTION OF THE INVENTION

As indicated above, aspects of the invention provide a solution forfabricating a heterostructure, such as a group III nitrideheterostructure, for use in an optoelectronic device. Theheterostructure can be epitaxially grown on a sacrificial layer, whichis located on a substrate structure. The sacrificial layer can be atleast partially decomposed using a laser. The substrate structure can becompletely removed from the heterostructure or remain attached thereto.One or more additional solutions for detaching the substrate structurefrom the heterostructure can be utilized. The heterostructure canundergo additional processing to form the optoelectronic device.

As used herein, unless otherwise noted, the term “set” means one or more(i.e., at least one) and the phrase “any solution” means any now knownor later developed solution. It is understood that, unless otherwisespecified, each value is approximate and each range of values includedherein is inclusive of the end values defining the range. As usedherein, unless otherwise noted, the term “approximately” is inclusive ofvalues within +/−ten percent of the stated value, while the term“substantially” is inclusive of values within +/−five percent of thestated value. Unless otherwise stated, two values are “similar” when thesmaller value is within +/−twenty-five percent of the larger value. Avalue, y, is on the order of a stated value, x, when the value ysatisfies the formula 0.1x≤y≤10x.

As also used herein, a layer is a transparent layer when the layerallows at least ten percent of radiation having a target wavelength,which is radiated at a normal incidence to an interface of the layer, topass there through. Furthermore, as used herein, a layer is a reflectivelayer when the layer reflects at least ten percent of radiation having atarget wavelength, which is radiated at a normal incidence to aninterface of the layer. In an embodiment, the target wavelength of theradiation corresponds to a wavelength of radiation emitted or sensed(e.g., peak wavelength +/−five nanometers) by an active region of anoptoelectronic device during operation of the device. For a given layer,the wavelength can be measured in a material of consideration and candepend on a refractive index of the material. Additionally, as usedherein, a contact is considered “ohmic” when the contact exhibits closeto linear current-voltage behavior over a relevant range ofcurrents/voltages to enable use of a linear dependence to approximatethe current-voltage relation through the contact region within therelevant range of currents/voltages to a desired accuracy (e.g., +/−onepercent).

Embodiments described herein can be directed to fabrication of a groupIII nitride-based device, which includes one or more active layersformed of a group III nitride material. Group III nitride materialscomprise one or more group III elements (e.g., boron (B), aluminum (Al),gallium (Ga), and indium (In)) and nitrogen (N), such thatB_(w)Al_(x)Ga_(y)In_(z)N, where 0≤w, x, y, z≤1, and w+x+y+z=1.Illustrative group III nitride materials include binary, ternary andquaternary alloys such as, AlN, GaN, InN, BN, AlGaN, AlInN, AIBN,AlGaInN, AlGaBN, AlInBN, and AlGaInBN with any molar fraction of groupIII elements.

While illustrative aspects of the invention are described in conjunctionwith group III nitride heterostructures, it is understood thatembodiments of the invention can be utilized in conjunction with thefabrication of various types of devices using heterostructures formedusing other materials. For example, embodiments can be directed todevices fabricated using another type of group III-V material, such asdevices fabricated using group III arsenide materials, group IIIphosphide materials, and/or the like. When utilized in conjunction withheterostructures formed with materials other than group III nitridematerials, it is understood that one or more variations may be required,such as use of different parameters, selection of different materials,and/or the like.

Turning to the drawings, FIGS. 1A and 1B illustrate fabrication of agroup III nitride heterostructure 16 according to an embodiment. Asillustrated in FIG. 1A, the group III nitride heterostructure 16 can befabricated as part of a growth structure 10, which includes a substratestructure 12, a sacrificial layer 14 directly on the substrate structure12, and the group III nitride heterostructure 16 directly on thesacrificial layer 14. Subsequently, as illustrated in FIG. 1B, thesacrificial layer 14 can be decomposed, leaving two separate structures,the group III nitride heterostructure 16 and the substrate structure 12.This process can be referred to as releasing the group III nitrideheterostructure 16, lift-off of the group III nitride heterostructure16, and/or the like. The group III nitride heterostructure 16 can befurther processed to fabricate a set of group III nitride-basedoptoelectronic devices. In an embodiment, the substrate structure 12 canbe processed (e.g., cleaned) and reused for subsequent fabrication ofone or more additional group III nitride heterostructures 16.

In an embodiment, the group III nitride heterostructure 16 includes someor all of the layers of a heterostructure for fabricating acorresponding optoelectronic device. In an embodiment, theoptoelectronic device is configured to operate as an emitting device,such as a light emitting diode (LED), e.g., a conventional or superluminescent LED, or a laser diode (LD), a light emitting solid statelaser, and/or the like. However, it is understood that the device can beanother type of device, such as a photo-detector, a photodiode, ahigh-electron mobility transistor (HEMT), or another type ofoptoelectronic device.

When the optoelectronic device is operated as an emitting device,application of a bias comparable to the band gap results in the emissionof electromagnetic radiation from an active region of the optoelectronicdevice. The electromagnetic radiation emitted (or sensed) by theoptoelectronic device can have a peak wavelength within any range ofwavelengths, including visible light, ultraviolet radiation, deepultraviolet radiation, infrared light, and/or the like. In anembodiment, the device is configured to emit (or sense) radiation havinga dominant wavelength within the ultraviolet range of wavelengths. In amore specific embodiment, the dominant wavelength is within a range ofwavelengths between approximately 210 and approximately 360 nanometers.

The growth structure 10 can be fabricated using any solution. In anembodiment, fabrication of the growth structure 10 initially includesepitaxially growing a set of group III nitride layers 22A, 22B directlyon a substrate 20. The substrate 20 can comprise any type of substratesuitable for use in a process described herein. In an illustrativeembodiment, the substrate 20 is sapphire. However, it is understood thatthe substrate 20 can be formed of any suitable material including, forexample, silicon carbide (SiC), silicon (Si), bulk GaN, bulk AlN, bulkor a film of AlGaN, bulk or a film of BN, AlON, LiGaO2, LiAlO2, aluminumoxinitride (AlOxNy), MgAl2O4, GaAs, Ge, or another suitable material.

The substrate structure 12 can include any number of group III nitridelayers, which can be designed to promote high quality growth of thesubsequent layers in the group III nitride heterostructure 16. To thisextent, while the substrate structure 12 is shown including two groupIII nitride layers 22A, 22B, it is understood that embodiments of thesubstrate structure 12 can include fewer or more group III nitridelayers. In a further embodiment, a substrate structure 12 without anygroup III nitride layers can be utilized in a process described herein.Regardless, when included, the group III nitride layers 22A, 22B cancomprise, for example, a nucleation layer 22A and a buffer layer 22B.Each of the nucleation layer 22A and the buffer layer 22B can becomposed of any suitable material, such as a group III nitride material.Illustrative group III nitride materials include AlN, an AlGaN/AlNsuperlattice, and/or the like. In another embodiment, the layer 22Acomprises a buffer layer and layer 22B comprises a transition layer. Inthis case, the layer 22A can be composed of AlN, while the layer 22B canbe composed of Al_(w)In_(x)B_(y)Ga_(z)N, where 0≤w, x, y, z≤1, andw+x+y+z=1. When the group III nitride heterostructure 16 is configuredfor fabrication of an ultraviolet light emitting diode, the layer 22Bcan be AlN and have a thickness chosen to minimize a number ofdislocations in the layers of the group III nitride heterostructure 16.For example, the thickness of the layer 22B can be between 1-10micrometers.

The sacrificial layer 14 can be epitaxially grown directly on thesubstrate structure 12, e.g., a surface of the layer 22B. Thesacrificial layer 14 can be of any suitable material that decomposeswhen irradiated by a laser. In an embodiment, the sacrificial layer 14is formed of a group III nitride material. For example, the sacrificiallayer 14 can be formed of a group III nitride semiconductor materialhaving a bandgap value lower than a bandgap value of any layer in thesubstrate structure 12. In an embodiment, the change in the bandgapvalue results in at least an order of magnitude increased absorption ofthe irradiated laser light by the sacrificial layer 14 as compared toany semiconductor layer in the substrate structure 12. In an embodiment,the sacrificial layer 14 is formed of GaN and each group III nitridesemiconductor layer 22A, 22B in the substrate structure 12 has analuminum molar fraction of at least 0.5. In a more particularembodiment, the group III nitride semiconductor layer 22B immediatelyadjacent to the sacrificial layer 14 is AlN.

A thickness (in the growth direction) of the sacrificial layer 14 can beconfigured to result in stresses and strains within the sacrificiallayer 14 that are high, but do not significantly alter the number ofdislocations present in the semiconductor layer grown above thesacrificial layer 14 (e.g., the first layer in the group III nitrideheterostructure 16). In an embodiment, a thickness of the sacrificiallayer 14 is selected to reduce a number of dislocations within thefollowing semiconductor layer. In an illustrative embodiment, such athickness is between 10 nanometers and 500 nanometers. A substantiallyoptimal thickness for the sacrificial layer 14 can be determined, forexample, by growing sacrificial layers with differing thicknesses anddetermining a minimum thickness leading to an onset of dislocationformation. The sacrificial layer 14 can be grown to a thicknessapproximately ten percent less than the minimum thickness determined.The sacrificial layer 14 thickness and composition can be configuredsuch that most of the intensity of the laser beam used during lift-offis absorbed by the sacrificial layer 14. In an embodiment, the thicknessof the sacrificial layer 14 is selected to be at least one absorptionlength for a corresponding laser beam to be used for the lift-off, wherean absorption length is a length in which an intensity of the radiationis decreased by a factor of exp(1) throughout the thickness of thesacrificial layer 14.

In a more particular embodiment, the group III nitride semiconductorlayer 22B is an aluminum nitride layer and the sacrificial layer 14forms a sharp composition interface therewith. Additionally, the firstsemiconductor layer in the heterostructure 16 can be an n-type dopedgroup III nitride semiconductor layer that is at least one micron thick.In a more particular embodiment, the first semiconductor layer in theheterostructure 16 (immediately adjacent to the sacrificial layer) isAl_(x)Ga_(1-x)N, where 0<x<1. Additionally, the sacrificial layer 14 cancomprise Al_(x1)Ga_(1-x1)N, where x1<x. In another embodiment, thesacrificial layer 14 can comprise Al_(x)In_(y)B_(z)Ga_(1-x-y-z)N, where0≤x, y, z≤1 and 0≤1-x-y-z≤1.

An embodiment of the sacrificial layer 14 can include alternatingsub-layers, which are configured to have alternating tensile andcompressive stresses. The tensile and compressive sub-layers can beobtained by, for example, varying a V-III precursor ratio used duringepitaxial growth of the sacrificial layer 14. It is understood thatother growth parameters (e.g., time, temperature, pressure, and/or thelike) can be varied to induce changes in the lattice structure of thesacrificial layer 14 and/or for inducing internal stresses within thesacrificial layer 14, which can be particularly useful for improving thelift-off process using the sacrificial layer 14. For example, anembodiment of the sacrificial layer 14 can be heavily doped to inducepoint defects and other defects therein, which can induce ablationthrough joule heating.

FIGS. 2A and 2B show illustrative sacrificial layers 14A, 14B, each ofwhich can be implemented as the sacrificial layer 14 in the growthstructure 10 shown in FIG. 1 , according to embodiments. In FIG. 2A, thesacrificial layer 14A has a composition that varies laterally. Forexample, the sacrificial layer 14A can include a set of firstcomposition regions 24A alternating with a set of second compositionregions 22B. In an embodiment, the set of second composition regions 22Bare formed from a topmost portion of the group III nitride semiconductorlayer 22B in the substrate structure 12. In this case, the layer 22B canbe grown and the surface subsequently patterned to form a set ofopenings in the layer 22B for subsequent growth of the set of firstcomposition regions 24A directly thereon. Alternatively, the secondcomposition regions 22B can be formed of a masking material, such assilicon dioxide, which can be readily chemically etched. The patterningcan include, for example, applying a masking material over regionsdefining the pattern, and etching the unmasked portions to form the setof openings. The openings can extend any distance into the layer 22B.For example, the distance can be determined using the approach describedherein with respect to the thickness of the sacrificial layer 14.

The set of first composition regions 24A can comprise any suitable typeof group III nitride material. For example, a first composition region24A can be formed of GaN. In the embodiment shown in FIG. 2B, a firstcomposition region 24B can be formed of alternating sublayers of groupIII nitride materials. The sublayers can form a superlattice designed toinduce a large stress within the sacrificial layer 14B. The stress canbe induced by epitaxially growing lattice mismatched sublayers. Forexample, the sublayers can be formed of alternating layers ofAl_(x)Ga_(1-x)N/Al_(y)Ga_(1-y)N layers, where 0≤x, y≤1 and a differencebetween the molar fractions of x and y is at least 0.1. In a moreparticular embodiment, the difference between x and y is greater than0.5.

While both sacrificial layers 14A, 14B are described as being formed ina patterned surface of a substrate structure 12, it is understood thatan embodiment of a sacrificial layer can include one or more patternedsub-layers. For example, fabrication of a sacrificial layer can includegrowth of a first sub-layer, patterning the first sub-layer, and growinga second sub-layer directly on the patterned first sub-layer. Growth ofthe second sub-layer can include one or more changes in composition tothe second sub-layer as compared to the composition of the firstsub-layer. Such changes can include one or more of: composition changes;V-III precursor ratio changes; growth temperature changes; and/or thelike. However, it is understood that growth of both sub-layers canutilize the same growth conditions. While the growth of two sub-layersis described herein, it is understood that fabrication of a sacrificiallayer can include growth of any number of sub-layers.

While each of the sacrificial layers 14A, 14B is shown including aparticular number of regions, it is understood that a sacrificial layer14A, 14B can include any number of regions. Similarly, while the firstcomposition regions 24B are shown having a particular number ofsublayers, it is understood that a first composition region 24B caninclude any number of sublayers. A total number of sublayers in thesuperlattice can be configured to induce stresses and strains within thesacrificial layer 14B that are high, but do not significantly alter thenumber of dislocations present in the layer(s) grown on the sacrificiallayer 14B, if the sacrificial layer 14B was not included in the growthstructure. In an embodiment, the dislocation density in the subsequentlygrown layer(s) should not increase by more than 10% due to theintroduction of the sacrificial layer 14B. In another embodiment, thesacrificial layer 14B decreases the dislocation density when compared tosemiconductor structures having no sacrificial layer 14B.

An embodiment of a sacrificial layer described herein, such as thesacrificial layer 14 shown in FIG. 1A, can include a large number oflateral compositional fluctuations. Such fluctuations can be presentacross both dimensions of a lateral area of the sacrificial layer 14.For example, FIG. 3 shows schematics of illustrative compositionalfluctuations of a sacrificial layer 14C according to an embodiment. Forexample, the sacrificial layer 14C can comprise anAl_(x)In_(y)Ga_(1-x-y)N alloy with lateral fluctuations in aluminumand/or indium molar fractions.

The compositional fluctuations in the sacrificial layer 14C exceednormal fluctuations due to the limits of a growth process. A threedimensional growth method can be used for the sacrificial layer 14C toincrease a magnitude of such fluctuations. An illustrative threedimensional growth process is described in U.S. Pat. No. 8,787,418, U.S.patent application Ser. No. 14/721,082, and U.S. Pat. No. 9,281,441,each of which is hereby incorporated by reference. To this extent, suchfluctuations can be nano-scale and/or micron-scale compositional inhomogeneities. The fluctuations in composition can be several percent(e.g., three percent) or higher.

An embodiment of a sacrificial layer described herein, such as thesacrificial layer 14 shown in FIG. 1A, can include openings or vacanciesand/or be disjoint. For example, a sacrificial layer described hereincan include one or more regions comprising columnar structures. Examplesof such a layer and the fabrication thereof are shown and described inU.S. patent application Ser. No. 14/504,456, U.S. patent applicationSer. No. 14/519,230, and U.S. patent application Ser. No. 14/628,281,each of which is hereby incorporated by reference.

To this extent, FIGS. 4A and 4B show illustrative growthheterostructures 10A, 10B including composite sacrificial layers 14D,14E, respectively, according to embodiments. In FIG. 4A, the compositesacrificial layer 14D can include multiple sub-layers 26A-26C. A firstsub-layer 26A can include a plurality of columnar structures, and asecond sub-layer 26B at least partially continuous (e.g., fill at leastfifty percent of the lateral area of the sacrificial layer 14D). Thesecond sub-layer 26B can physically connect at least some of thecolumnar structures of the first sub-layer 26A, but can include variouscavities 28. The composite sacrificial layer 14D also can include athird sub-layer 26C which can be an essentially continuous semiconductorlayer containing at most ten percent voids (i.e., at least ninetypercent of the lateral area is covered by the essentially continuoussub-layer 26C). Inclusion of a columnar sub-layer 26A can makeseparation of the group III nitride heterostructure 16 from thesubstrate structure 20 easier. In an embodiment, the columnar sub-layer26A is fabricated of a group III nitride semiconductor material that isabsorbing to irradiated light used to induce decomposition of thesub-layer 26A due to ablation as described herein.

In FIG. 4B, the columnar structures include several sub-layers. Forexample, the sacrificial layer 14E includes a first sub-layer withcolumnar structures of a first material, followed by a second sub-layer26D in which the material of the columnar structures is changed, and athird sub-layer 26E in which the material of the columnar structures ischanged again. In one embodiment, the sub-layers 26A, 26E comprise thesame materials, while the sub-layer 26D is a distinct material from thesub-layers 26A, 26E. For example, the material of the sub-layer 26D canbe a superlattice layer, such as the superlattice layers 24B shown anddescribed with reference to FIG. 2B.

Furthermore, while not shown for clarity, it is understood that thesub-layer 26A can include a filler material surrounding the columnarstructures, which includes openings within which the columnar structuresare grown. An illustrative filler material comprises silicon dioxide. Tothis extent, FIGS. 5A and 5B show an illustrative process for growingcolumnar structures according to an embodiment. In FIG. 5A, a maskingdomain 25 can be formed on a top surface of a substrate structure 20. Asillustrated, the masking domain 25 can include perforations, whichextend completely through the masking domain 25 to the substratestructure 20. In FIG. 5B, columnar structures 27 are grown within theperforations of the masking domain 25. A thickness of the masking domain25 can be selected to maintain pseudomorphic growth of the sacrificiallayer relative to the underlying substrate structure 20.

As shown in FIG. 5B, a columnar structure 27 can include domains ofdifferent composition. To this extent, FIG. 5C shows an illustrativecolumnar structure 27 including multiple sub-layers 29A, 29B accordingto an embodiment. In an illustrative embodiment, the sub-layers 29Acomprise AlInGaN with a high composition of gallium and some compositionof indium, while the sub-layers 29B comprise AlInGaN with a highercomposition of aluminum. For example, an aluminum molar fraction insub-layer 29B can be greater than 0.6, while the sub-layer 29A can havean aluminum molar fraction less than 0.5.

A masking domain 25 can be patterned and etched multiple times to createa sacrificial layer including laterally inhomogeneous columnarstructures. For example, FIG. 6 shows a top view of laterallyinhomogeneous columnar structures located within a masking material 25,such as SiO₂, according to an embodiment. In this case, the columnarstructures include columnar structures 27A-27C, each formed of adifferent material. For example, columnar structures 27A can be amaterial rich in aluminum, columnar structures 27B can be a dielectricmaterial (e.g., a UV transparent dielectric material), and columnarstructures 27C can be a gallium rich domains. Each type of columnarstructure 27A-27C can be grown in turn after a corresponding patterningand etching of the making material 25. While a particular arrangement ofthe various materials 25, 27A-27C is illustrated, it is understood thatany suitable arrangement, periodic or irregular, can be utilized.

It is understood that the sub-layers of a sacrificial layer and/or acolumnar structure described herein can include any number ofvariations. For example, as illustrated in FIG. 7 , a sacrificial layer14F (or a columnar structure thereof) can include several sub-layers26F-26J, which can be formed using various different materials, dopinglevels, growth parameters (e.g., temperature, time, V/III ratio), and/orthe like. Additionally, one or more of the sub-layers, such as thesub-layer 26G, can have a graded composition and/or graded doping level.As illustrated by the irregular interfaces between the sub-layers26F-26J, the growth process can promote variation in the surfaceboundary for one or more of the sub-layers.

As described herein, the substrate structure 12 can include one or moregroup III nitride layers. In an embodiment, a growth structure describedherein can include a substrate structure 12 including a set of group IIInitride layers configured to improve one or more features of a removalprocess described herein.

For example, FIG. 8A shows an illustrative growth structure 10Caccording to an embodiment. In this case, the growth structure 10Cincludes a substrate structure 12 including a substrate 20 on which afirst layer 22C and a top substrate structure layer 22D are grown. Thefirst layer 22C can comprise a buffer layer. The top substrate structurelayer 22D can comprise a layer of group III nitride material having areduced number of dislocations 50 at a top surface immediately adjacentto the sacrificial layer 14. In an embodiment, the top substratestructure layer 22D comprises a relatively thick (e.g., 1-20 μm) layerof aluminum nitride. In a more particular embodiment, the AlN topsubstrate structure layer 22D has a thickness in a range of 5-20 μm.Such an AlN top substrate structure layer 22D can allow reduction ofdislocation densities, and also be reused for subsequent growth afterremoval of the group III nitride heterostructure 16. Growth of such athick AlN layer 22D is currently the state of the art technology inepitaxial growth of group III nitride semiconductor films and can beaccomplished by mitigating stresses within the film through introductionof compressive/tensile sub-layers where the sub-layers are grown bychanging the V/III molar ratio used during growth.

FIG. 8B shows an illustrative embodiment of the top substrate structurelayer 22D, which includes several sub-layers forming a laminatestructure. In an embodiment, the sub-layers can form a periodic pattern,in which case the top substrate structure layer 22D comprises asuperlattice. A top substrate structure layer 22D including acompositional superlattice can further mitigate stresses. For example,the top substrate structure layer 22D can include lattices of the type:Al_(x)Ga_(1-x)N/AlN, where x is between 0.7-0.9; orAl_(x)Ga_(1-x)N/Al_(y)Ga_(1-y)N, where x, y>0.7 and |x-y|<0.2.

Similarly, the sacrificial layer 14 can be sufficiently thick to allowfor significant (e.g., at least 80%) or complete (at least 95%)absorption of radiation at the irradiated wavelength used in a removalprocess described herein. For example, the sacrificial layer 14 cancomprise Al_(x)Ga_(1-x)N, where the aluminum molar fraction andthickness are configured to prevent relaxation of the sacrificial layer14, which can lead to a large number of dislocations, while also havinga desired thickness. To further control the thickness, relaxation, andabsorption properties, the sacrificial layer 14 also can comprise alaminate structure including multiple sub-layers of differingcompositions. An embodiment of the sacrificial layer 14 can: comprise asuperlattice having quantum wells and barriers; include one or moresub-layers with graded composition; include sub-layers that do not forma periodic pattern; and/or the like.

As discussed herein, a surface of the substrate structure 12 can beconfigured to improve one or more attributes of the sacrificial layer 14and/or the group III nitride heterostructure 16 grown thereon. To thisextent, FIG. 9 shows a portion of a growth structure including a topsubstrate structure layer 22E that is patterned. For example, thepatterning can include a periodic or irregular arrangement of openingsand/or pillars, which extend partially into the top substrate structurelayer 22E. Subsequently, a sacrificial layer 14 can be grown thereon,followed by growth of the group III nitride heterostructure 16. Asillustrated, growth of the group III nitride heterostructure 16 canutilize various approaches for relieving stress and improving thequality of the semiconductor layers in the heterostructure 16. Suchapproaches can include, for example, growing alternatingtensile/compressive layers, superlattices, and/or the like. In general,a first semiconductor layer in the heterostructure 16 adjacent to thesacrificial layer 14 is designed for stress control and can comprise acontact layer. For such a configuration, the first semiconductor layercan be p-type or n-type doped. Subsequently grown layers can beconfigured based on the corresponding device for which theheterostructure 16 is to be utilized.

As described herein, the sacrificial layer is included in a growthstructure to enable the substrate structure 12 to be detached from thegroup III nitride heterostructure 16. The heterostructure 16 can befurther processed to fabricate a device package including theheterostructure 16. To this extent, FIGS. 10A-10F show illustrativeprocess steps for fabricating a device from a growth structure accordingto an embodiment. As shown in FIG. 10A, after fabricating the growthstructure 10 a handling member, such as a carrier substrate 30, can beattached to the heterostructure 16 using any solution. For example, thecarrier substrate 30 can be bonded to the group III nitrideheterostructure 16 using any suitable bonding material 32, such as anepoxy, soldering, and/or the like. The carrier substrate 30 cancomprise, for example, sapphire, glass, and/or the like.

Subsequently, the sacrificial layer 14 is decomposed to release thesubstrate structure 12 from the group III nitride heterostructure 16. Inan embodiment, decomposing the sacrificial layer 14 includes irradiatinga side surface of the sacrificial layer 14 with a laser 34. The laser 34can be used to completely separate the substrate structure 12 and thegroup III nitride heterostructure 16 to result in the structure shown inFIG. 10B.

Further processing can be performed to attach the group III nitrideheterostructure 16 to a submount and/or package for the device. In FIG.10C, a new carrier substrate 36 (e.g., sapphire or glass) can beattached to a bottom portion of the group III nitride heterostructure 36using any suitable bonding material 38 (e.g., epoxy or solder). In FIG.10D, the carrier substrate 30 is removed using any solution (e.g.,dissolving the epoxy using a chemical or reflowing the solder). In FIG.10E, the submount 40 can be attached to the group III nitrideheterostructure 16 using any solution. For example, the submount 40 canbe attached to one or more layers of the heterostructure 16 using a setof electrodes. In FIG. 10F, the carrier substrate 36 is removed usingany solution (e.g., chemical or reflow). As a result, upon completion ofthe process, a device including the group III nitride heterostructure 16is provided. Depending on the device and targeted use of the device, itis understood that the sequence of the steps can be altered and somesteps can be removed or changed. For example, it is feasible to attachsubmount 40 and the submount carrying structure as a first step in FIG.10A. In general, it is understood that while the attachment of thesubstrate 30 can be performed using epoxy, attachment of the submount 40can be performed using soldering and result in a very differentpermanent connection with the heterostructure 16.

A wavelength of the radiation utilized to release the substratestructure 12 from the group III nitride heterostructure 16 can beselected to provide high absorption in the sacrificial layer 14 withoutsubstantial absorption in the layers in the substrate structure 12. Asdescribed herein, the sacrificial layer 14 can comprise an AlGaNsemiconductor layer. To this extent, FIGS. 11A and 11B illustrate therelationship between the wavelength, absorption coefficient, andaluminum content (x) of an AlGaN material. In particular, FIG. 11A showsthe absorption coefficient as a function of wavelength for variousillustrative aluminum molar fractions (x) for AlGaN, while FIG. 11Bshows the absorption fit for several aluminum molar fraction andwavelength pairs. As illustrated in FIG. 11A, each aluminum molarfraction has a corresponding absorption edge at which point theabsorption coefficient drops significantly. However, for all aluminummolar fractions, absorption above the absorption edge is on the order ofα=10⁵ 1/cm, and more conservatively, α=10⁴ 1/cm as shown in FIG. 11B,resulting in a loss of intensity I=I₀ exp(−αx), which provides completeabsorption over a thickness of several hundred nanometers. To thisextent, an embodiment of the sacrificial layer 14 can comprise GaN orAl_(0.2)Ga_(0.8)N, with a radiation wavelength chosen to be about 260 nmwhich can be obtained, for example, by doubling of 532 nm radiation froma frequency-doubled Nd:YVO4 laser. It is understood that FIG. 11B is anapproximation, and is not exactly linear. For example, at lowerwavelengths, the absorption exhibits a somewhat non-linear behavior.

A power of the laser radiation can be calculated by: I=CρHΔT, where C isthe specific heat (energy required to raise the one gram of thesubstance by one degree), ρ is the density of the film (such as thesacrificial layer 14), H is the thickness of the film, I is the laserintensity, and ΔT is the required change of temperature fordisintegrating the material. These values are available in theliterature for the AlGaN semiconductor devices, and the laser intensitycan be easily estimated. For example, the laser intensity forGaN/Sapphire lift-off can be approximately 750 mJ/cm².

A thickness (H) of the sacrificial layer 14 can be selected to be largerthan a characteristic absorption length corresponding to a length withinthe corresponding material where the intensity of the radiationdiminishes by ⅔ of its original intensity. In an embodiment, thethickness of the sacrificial layer 14 can be between 50 nm and 1 μm.

It is understood that the use of a laser 34 to separate the substratestructure 12 from the group III nitride heterostructure 16 can becombined with one or more other approaches for separating the structures12, 16. To this extent, removal of the substrate structure 12 canfurther include chemical removal, such as etching the sacrificial layer14. For example, the sacrificial layer 14 can be at least partiallyetched using hydrofluoric acid or the like. In this case, at least thesubstrate structure 12 and the sacrificial layer 14 can be placed in abath of hydrofluoric acid or the like. Additionally, the separation canuse chemical/photochemical etching in a solution with surfactants forimproved wetting of the narrow space between the sapphire and nitride(for example a tetramethylammonium hydroxide (TMAH) solution withsurfactants). In an embodiment, the removal process includes laserdecomposition and chemical etching to completely separate the structures12, 16.

In another embodiment, separation of the structures 12, 16 includespassing an electrical current through the sacrificial layer 14. To thisextent, FIGS. 12A and 12B show illustrative schematics for usingelectrical current for separating a substrate structure from a group IIInitride heterostructure according to embodiments. In FIG. 12A, a currentcan be administered through the sacrificial layer 14 via a pair ofelectrodes 42A, 42B connected to opposing sides of the sacrificial layer14 and a current source (not shown for clarity). In this case, thesacrificial layer 14 can be heavily doped and the electrical current caninduce ablation through joule heating.

It is understood that a removal process can include any combination oflaser decomposition, chemical etching, and/or joule heating. Forexample, FIG. 12B shows an illustrative schematic for separating asubstrate structure 12 from a group III nitride heterostructure 16 usingelectrical current and chemical etching according to embodiment. In thiscase, the substrate structure 12 and the sacrificial layer 14 are placedinto a chamber 44 comprising, for example, hydrofluoric (HF) acid oranother suitable acid. A pair of electrodes 46A, 46B are attached andcurrent is passed there through to facilitate electro-chemical lift-off.An electrode 48 can comprise a material resistant to the effects of theacid within the chamber 44, such as platinum. Such etching can beparticularly useful when the sacrificial layer 14 includes a maskingmaterial, such as silicon dioxide, and columnar structures as describedherein.

Furthermore, a removal process can include one or more of laserdecomposition, chemical etching, and/or joule heating combined with amechanical force. To this extent, FIGS. 13A-13B show illustrativeremoval processes including laser decomposition combined with amechanical force according to embodiments. As illustrated, a laser 34can be directed toward the sacrificial layer 14 through the substratestructure 12. In this case, the substrate structure 12 can include asubstrate 20 and a set of semiconductor layers 22A-22B which do notabsorb a significant portion of the laser 34 before the laser reachesthe sacrificial layer 14. The sacrificial layer 14 can comprise amaterial and a thickness that absorbs substantially all of the laser 34before it reaches the group III nitride heterostructure 16.

Regardless, the group III nitride heterostructure 16 can be physicallyattached (e.g., via a carrier substrate 30 shown in FIG. 10B) to amechanical actuator 50, which generates a mechanical force while thelaser 34 is directed toward the sacrificial layer 14. As illustrated inFIG. 13A, the mechanical force 52 can be a steady shear force exerted onthe heterostructure 16. As illustrated in FIG. 13B, the mechanical force54 can be a vibrational force exerted on the heterostructure 16. Acombination of the laser 34 and mechanical force 52, 54 can result inlift-off of the heterostructure 16 from the substrate structure 12. Inan embodiment, the laser 34 can be operated in a pulsed mode. In thiscase, the mechanical force 52, 54 can prevent recrystallization ofchemical bonds in the sacrificial layer 14 and improve the lift-off. Itis understood that the mechanical force 52, 54 can be initiated after aninitial period of operating the laser 34 to allow some degradation ofthe sacrificial layer 14 to occur first.

While primarily shown and described in conjunction with detaching thegroup III nitride heterostructure 16 from the substrate structure 12, itis understood that embodiments can be directed to only the partialdetachment of the heterostructure 16 from the substrate structure 12.For example, such partial detachment can be utilized to relieve stress,provide optical scattering, and/or the like.

To this extent, FIGS. 14A and 14B show illustrative device structures60A, 60B after partial ablation of the sacrificial layer 14G, 14H,respectively, according to embodiments. In this case, each devicestructure 60A, 60B includes an active group III nitride heterostructure16 attached to a substrate structure 12 by a sacrificial layer 14G, 14Hthat has been partially destroyed, e.g., by laser ablation, chemicaletching, mechanical forces, electrical current, and/or the like. Partiallaser ablation can be accomplished by laterally changing an intensity ofthe laser radiation utilized, which can result in a sacrificial layer14G having a random ablation pattern or a sacrificial layer 14H having aperiodic ablation pattern. For the manufacturing of a device 60A, 60Bconfigured to emit radiation, the ablation pattern for a sacrificiallayer 14G, 14H can be configured to comprise a photonic crystal, form adistributed Bragg reflector, form a diffraction grating, and/or form anyother similar type of distributed element for manipulating theproperties of the radiation. In an alternative embodiment, thestructures 60A, 60B can be intermediate structures and complete lift-offof the heterostructure 16 can be accomplished by subsequent mechanicalforces (e.g., physical peeling), chemical etching, and/or the like.

In an embodiment, grooves can be formed in the growth structure 10 priorto lift-off of the heterostructure 16. To this extent, FIGS. 15A and 15Bshow side and top views of an illustrative growth structure 10 accordingto an embodiment. In an embodiment, the grooves 80 penetrate the growthstructure 10 to an extent at least below the sacrificial layer 14. Forexample, the grooves are shown extending beyond the layer 22B andpartially into the layer 22A. However, it is understood that this isonly illustrative, and the grooves 80 can penetrate to any location atleast as deep as the sacrificial layer 14. To this extent, in otherembodiments some or all of the grooves can terminate within any of thesubstrate 20, within any layer 22A, 22B located below the sacrificiallayer 14, or within the sacrificial layer 14.

Prior to formation of the grooves 80, a masking layer 82 can be formedon the group III nitride heterostructure 16, e.g., to protect the groupIII nitride heterostructure 16 during formation of the grooves 80. Thegrooves 80 can be fabricated using any combination of one or moresolutions, including photolithography, etching, laser scribing, and/orthe like. The masking layer 82 can be formed of any material suitablefor protecting the group III nitride heterostructure 16 during formationof the grooves 80. Illustrative materials include photoresists, such asdiazonaphthoquinone. In an embodiment, the grooves 80 are filled with adielectric material 84, which can reduce oxidation of the semiconductorlayers and/or manage the light extraction efficiency. The dielectricmaterial 84 can be selected such that it is transparent to the radiationthat will be emitted or sensed by the resulting optoelectronic devices.Illustrative dielectric materials 84 include SiO₂, Al₂O₃, Si₃N₄, CaF₂,MgF₂, HfO₂, epoxy, and/or the like.

The grooves can have any convenient placement forming regions betweenthe grooves, each of which can correspond to a heterostructure used forforming one or more optoelectronic devices, such as one or more lightemitting diodes. As illustrated in FIG. 15B, the grooves 80 can runlaterally through the heterostructure, with both parallel andintersecting grooves 80, thereby forming a mesh defining multipledistinct regions. In an embodiment, immediately adjacent parallelgrooves 80 are separated by a distance that corresponds to a size of atleast one optoelectronic device. An illustrative size range for anoptoelectronic device is between 0.1 millimeters and 10 millimeters.While the intersecting grooves 80 are shown having substantiallyperpendicular orientations and each groove 80 is shown as a straightline, it is understood that these features are only illustrative andgroove 80 of various orientations and including one or more curves canbe formed in the growth structure 10.

In an embodiment, size of a laser beam is selected to be substantiallysmaller in area than the lateral area of the group III nitrideheterostructure. Use of a laser beam of this size can enableoptimization of the lift-off process for the heterostructure 16, e.g.,for semiconductor layers including aluminum nitride. FIG. 16 showsimpact areas for two illustrative laser beams 35A, 35B according toembodiments. As illustrated, a laser beam 35A can have an elliptical(e.g., circular) shape, while a laser beam 35B can have a rectangular(e.g., square) shape. However, it is understood that these shapes areonly illustrative and a laser beam can have any shape. Regardless, in anembodiment, the laser beam 35A, 35B has a cross-sectional area that isat least twice as small as a cross-sectional area of the growthstructure 10. In a more particular embodiment, the laser beam 35A, 35Bhas a cross-sectional area that is at least twice as small as across-sectional area of each optoelectronic device to be fabricatedusing the growth structure 10 (e.g., a cross-sectional area of eachregion defined by the grooves shown in FIGS. 15A and 15B). In anembodiment, such a cross-sectional area is less than 1 millimeter.

Regardless, the laser lift-off can be accomplished by moving the laserbeam laterally over the area of the growth structure 10 to decompose thesacrificial layer located therein. Such movement can include at leastsome overlap of the lateral regions irradiated by the laser beam. Thelaser wavelength can be selected to be absorbed by the sacrificiallayer. In an embodiment, the laser wavelength can range from 190-260 nm.In a more particular embodiment, the peak laser wavelength can be 248nm. Such wavelengths may not be significantly absorbed by a buffer layer(e.g., formed of aluminum nitride), but will be absorbed by asacrificial layer having a smaller bandgap than the buffer layer. In anembodiment, the laser wavelength and composition of the sacrificiallayer are selected to result in an absorption coefficient of at least10⁴ inverse centimeters.

A sacrificial layer described herein can have a uniform composition or avarying composition. For example, the sacrificial layer can have auniform composition averaged over a square area of 100 nanometer sideswith compositional variation not exceeding 10%. The sacrificial layercan comprise a layer that has composition gradient in a growthdirection, where the sacrificial layer can comprise Al_(x)Ga_(1-x)Nlayer or layer that can also incorporate indium and/or boron.Additionally, a sacrificial layer described herein comprise a laminatelayer having sub-layers of distinctly different compositions. In anembodiment, a laminate can have sublayers having higher composition ofGaN, resulting in a lower bandgap and a higher absorption of the laserradiation. Still further, the sacrificial layer 14 can be undoped orhave n-type (e.g., silicon dopants) or p-type (e.g. magnesium dopants)doping. Doping the sacrificial layer can introduce additional pointdefects within the layer, resulting in a lower homogeneity, and as aresult, improved decomposition properties.

In an embodiment, a growth structure 10 described herein can includemultiple, non-adjacent sacrificial layers. For example, FIG. 17 shows anillustrative growth structure 10, which includes two sacrificial layers14A, 14B according to an embodiment. In an embodiment, each sacrificiallayer 14A, 14B has a different composition. In this case, as well aswhen a sacrificial layer comprises a laminate of sub-layers of differentcompositions, the respective compositions can be effectively decomposedwith laser beams 34A, 34B of distinct wavelengths λ₁, λ₂, respectively.To this extent, a first laser beam 34A with a first wavelength λ₁ isused to decompose the first sacrificial layer 14A (e.g., the layer 22A),whereas a second laser beam 34B with a wavelength λ₂ different from thefirst wavelength λ₁ is used to decompose the second sacrificial layer14B. As illustrated, each laser beam 34A, 34B can have a small lateralarea and can be moved laterally to decompose the corresponding layer14A, 14B. In an embodiment, the decompositions can be performed in astaggered manner, with vertically overlapping or non-overlapping areasof the sacrificial layers 14A, 14B being decomposed. Such aconfiguration can enable lift-off at several different locations,resulting in corrugated outside surface that can be used to improvelight extraction efficiency.

As shown in various embodiments, the lift-off can direct the laserthrough a substrate 20 and one or more group III nitride layers 22A, 22Bprior to the laser impeding the sacrificial layer 14. To this extent,the substrate 20 and/or group III nitride layer(s) 22A, 22B can beselected to be transparent to the laser. In an embodiment, the substrate20 is formed of sapphire. To further reduce absorption of the laser bythe substrate 20, the substrate 20 can be thinned after fabrication ofthe growth structure 10, but prior to performing the lift-off.Additionally, prior to thinning the substrate 20, the semiconductorlayers can be bonded from the top to a conductive holder in order toconduct mechanical processing of the sapphire/semiconductor filmassembly.

Regardless, FIG. 18 shows an illustrative embodiment in which thesubstrate 20 is thinned prior to the lift-off according to anembodiment. In particular, the substrate 20 is shown being laterally cutto remove a portion thereof. The substrate 20 can be thinned using anysolution, such as polishing. In an embodiment, the remaining substrate20 has a thickness on the order of 100 microns or no more than 200microns in another embodiment. By thinning the substrate 20, an amountof scattering and absorption that occurs during the laser lift-off canbe reduced. Additionally, mechanical stresses presented in the growthstructure 10 also can be reduced prior to performing the lift-offprocess.

After thinning the substrate 20 and/or when no thinning is desired, thesubstrate 20 can be further processed to reduce scattering of the laser.For example, the back surface of the substrate 20 can be polished tohave a root mean square (RMS) roughness that is less than the smallestwavelength of the laser(s) used to perform the lift-off. In anembodiment, the RMS roughness is less than fifty nanometers. In anembodiment, an anti-reflective coating can be applied to the backsurface of the substrate 20 to reduce reflection at the interfacebetween the substrate 20 and ambient.

In addition to removal of the substrate structure 12, the group IIInitride heterostructure 16 can undergo further processing to result in acompleted device. FIG. 19 shows a schematic structure of an illustrativeoptoelectronic device 62 fabricated from a group III nitrideheterostructure 16 according to an embodiment. In this case, the device62 is fabricated from a heterostructure 16, which includes an n-typecontact layer 17A, an active region 17B (e.g., a series of alternatingquantum wells and barriers), an electron blocking layer 17C, and ap-type contact layer 17D. However, it is understood that thisheterostructure 16 is only illustrative and various alternativeheterostructures 16 can be utilized.

As illustrated, the device 62 is configured to operate in a flip-chipconfiguration. In this case, the n-type contact layer 17A is located ona top side of the optoelectronic device 62 and can be configured to betransparent to radiation generated by the active region 17B. To thisextent, after removal of a substrate structure described herein, e.g.,via ablation of a sacrificial layer on which the n-type contact layer17A can be grown directly thereon, a covering layer 64 can be formed onthe n-type contact layer 17A. The covering layer 64 can include one ormore features to improve extraction of the radiation from the device 62.In an embodiment, the covering layer 64 can be formed of any type ofencapsulating material, such as an insulating transparent material. Forexample, the covering layer 64 can comprise a fluoropolymer chosen froma group of ultraviolet transparent polymers or visible epoxy typepolymers. In an alternative embodiment, the covering layer 64 can be agroup III nitride layer of material, which is included in the group IIInitride heterostructure 16. In either case, a top surface of thecovering layer 64 can include roughness, be patterned, include aphotonic crystal, include imprints (e.g., to form a Fresnel lens ormodify optical properties of the surface), and/or the like, which canimprove one or more attributes of the light extraction from the device62.

Additionally, the heterostructure 16 can be etched to expose a topsurface of the n-type contact layer 17A for attachment of a contactthereto. A p-type contact 66, which can form an ohmic contact to thep-type contact layer 17D, can be attached to the p-type contact layer17D and a p-type electrode 68 can be attached to the p-type contact 66.Similarly, an n-type contact 70, which can form an ohmic contact to then-type contact layer 17A, can be attached to the n-type contact layer17A and an n-type electrode 72 can be attached to the n-type contact 70.The contacts 66, 70 and the electrodes 68, 72 can be formed of anysuitable material (e.g., one or more layers of metal) and can beconfigured to be reflective or transparent to radiation emitted by theactive region 17B.

In an embodiment, the p-type contact 66 includes a material stable athigh temperatures (e.g., 500-1000 Celsius), e.g., to prevent p-ohmicdegradation, layer inter-diffusion, diffusion to the nitride layers,delamination, and/or the like. For example, an embodiment of the p-typecontact 66 can comprise nickel oxide and rhodium layers. In anembodiment, the p-type contact 66 comprises a diffusion barrierconductive metallic layer (e.g., titanium/molybdenum (Ti/Mo), nickel,tungsten, indium tin oxide (ITO), and/or the like) deposited over ap-type ohmic metallic layer. Additionally, the p-type contact 66 cancomprise a top layer metallic layer of, for example, gold.

As further shown with respect to the optoelectronic device 62, thedevice 62 can be mounted to a submount 40 via the electrodes 68, 70. Theelectrodes 68, 72 can both be attached (e.g., soldered) to the submount40 via contact pads 74, 76, respectively. The submount 40 can have athermal conductivity magnitude of at least the thermal conductivity ofthe last semiconductor layer in the heterostructure 16 (e.g., the p-typecontact layer 17D). In an illustrative embodiment, the submount 40 canbe formed of aluminum nitride (AlN), silicon carbide (SiC), and/or thelike. To this extent, the submount 40 can comprise a thermallyconductive material having a thickness and mechanical strength that aresufficient for using the submount 40 to transfer the semiconductorheterostructure that results after the lift-off process is complete. Inan embodiment, the submount 40 can be bonded to the optoelectronicdevice 62 via soldering. For example, the soldering can use a soldermaterial with fine grains (e.g., silver epoxy) or an amorphous solderingalloy, such as a gold tin alloy.

While the device 62 is shown having a flip-chip configuration, it isunderstood that a device described herein can have any suitableconfiguration. For example, in an alternative embodiment, theheterostructure 16 can be implemented in a vertical deviceconfiguration. In this case, an n-type contact can be formed on anexposed surface 19A of the n-type contact layer 17A and a p-type contactcan be formed on an exposed surface 19B of the p-type contact layer 17Dwithout etching the heterostructure 16. As one of the n-type contactlayer 17A or the p-type contact layer 17D is grown directly on asacrificial layer described herein, the formation of the correspondingcontact can be performed after the lift-off has been completed.

In either configuration, at least a portion of a surface to which anelectrode 68, 70 is attached can remain uncovered by the correspondingelectrode. In this case, one or more of the uncovered surfaces of thecontact layers 17A, 17D can be configured to improve light extractionthere through. For example, the surface can be roughened or patterned asdescribed herein. In an alternative embodiment, one or more of theuncovered surfaces of the contact layers 17A, 17D can be covered with areflective layer of material to direct the radiation toward an emittingsurface. In either case, the transparent or reflective material can bediffusively transparent or diffusively reflective, respectively.

In an embodiment, some or all of the additional processing is performedprior to performing the lift-off process described herein. For example,the p-type contact 66 and/or p-type electrode 68 can be formed on thep-type contact layer 17D of the heterostructure 16. Additionally,following formation of the p-type contact 66, a conducting holdingsubmount can be deposited, which can serve a dual function of processingthe semiconductor films during lift-off and subsequent operation as thep-type electrode 68. It is understood that the p-type contact 66 can bedeposited and annealed prior to bonding to the conducting holdingsubmount, where the bonding can comprise soldering with an appropriatesoldering alloy.

When the n-type contact is fabricated on the surface 19A exposed by thelift-off process, the surface 19A can be configured to improve then-type contact properties. For example, the n-type contact layer 17A cancomprise an n-type AlGaN layer, which can have a high n-type doping inthe vicinity of the exposed surface 19A. Such n-type doping cancomprise, for example, silicon doping with a dopant concentration of atleast 10¹⁹ 1/cm³.

FIG. 20 shows an illustrative n-type contact 70 formed on an exposedsurface 19A of an n-type contact layer according to an embodiment. Asillustrated, the n-type contact 70 can form a mesh structure on thesurface 19A. One or more attributes of the mesh structure can beconfigured based on one or more optical and/or electrical properties ofthe corresponding optoelectronic device. Such attributes can include awidth of the mesh lines, a separation distance between adjacent meshlines, a number of mesh lines, orientations of the mesh lines, locationsof the mesh lines, and/or the like. Illustrative properties includedevice efficiency, device reliability, or a metric that incorporates twoor more of these characteristics.

The surface 19A can undergo various processing after being exposed,e.g., after lift-off. For example, the surface 19A can be processed toform a surface roughness, e.g., using wet etching or the like, which canimprove light extraction from the device. Regions of the surface 19A onwhich the n-type contact 70 is to be applied can be protected duringetching using, for example, a mask. In an embodiment, the surface 19A ofthe n-type contact layer is patterned prior to deposition of the n-typecontact 70. For example, the pattern can create valleys into which themesh lines are deposited.

The n-type ohmic properties of the n-type contact 70 can be improved viaannealing. To this extent, in an embodiment, the n-type contact 70 canbe annealed with a laser beam. The laser beam can create localizedheating at the n-type contact 70. In an embodiment, the laser beamcreates localized temperatures of at least 500 degrees Celsius.Attributes of the laser beam, such as an intensity and focus, can beselected so as not to damage the p-type contact, soldering layers, aswell as the semiconductor heterostructure. To this extent, the annealinglaser can utilize laser pulses having sufficiently short durations so tonot result in a p-type contact temperature that is higher than thetemperature used for annealing the p-type contact. In an embodiment, theintensity of the annealing laser beam is less than the intensity usedfor laser liftoff. In an embodiment, the laser beam is focused at then-type metal contact regions 70 and does not penetrate the semiconductorheterostructure. While the mesh contact is shown and described inconjunction with an n-type contact, it is understood that theconfiguration can be used in conjunction with formation of a p-typecontact.

In an embodiment, a group III nitride heterostructure 16 describedherein can include one or more attributes configured to prevent a laserfrom damaging one or more layers in the heterostructure, such as theactive layer, and/or one or more components of the corresponding device,such as a p-type contact. For example, the group III nitrideheterostructure 16 can comprise a layer with one or more attributesconfigured to scatter the laser radiation.

To this extent, FIG. 21 shows an illustrative growth structure 10according to an embodiment. In this case, the group III nitrideheterostructure 16 includes a scattering region 15. In an embodiment,the scattering region 15 comprises an epitaxial layer with patterningand/or compositional fluctuations, which are designed to protect thestructure located above the scattering region 15, on the side oppositethe sacrificial layer 14, by scattering the laser radiation away fromthe structure. In an embodiment, the protected structure includes theactive layer of the group III nitride heterostructure 16.

As illustrated, the scattering region 15 can include a layer patternedwith resulting hills and valleys. Epitaxial overgrowth of a subsequentlayer of the group III nitride heterostructure 16, such as an n-typelayer, can result in the semiconductor layers having a laterallyinhomogeneous compositions. In particular, due to different diffusionrate of Ga and Al atoms, the Ga atoms tend to concentrate in valleys ofthe patterning, resulting in higher Ga molar fraction in these regions.The regions with a higher Ga molar fraction can be more readily n-typedoped, thereby resulting in lateral fluctuation in conductivity andlight transmission of the n-type layer. In an embodiment, the n-typecontact, such as the contact shown in FIG. 20 , is deposited adjacent tothe regions having the higher Ga molar fraction. In this case, then-type contact conductivity can be improved, while reducing shadowingdue to n-type contact deposition.

A patterned layer is only illustrative of various solutions forscattering the laser radiation that can be implemented in a group IIInitride heterostructure 16 described herein. For example, a scatteringregion 15 can include a semiconductor layer with laterally varyingcomposition. The variation in composition can be configured to result ina band gap variation that is at least thermal energy and result invariation of the index of refraction of the semiconductor layer of atleast one tenth of a percent. In general, the domains have to becomparable or larger than a wavelength of the laser for scattering totake place. In an embodiment, the variation can occur over domainshaving a characteristic size of at least a wavelength of the laser up toa micron. The variation can create a variable index of refraction of theinhomogeneous layer, as well as interfaces between materials ofdifferent indexes of refraction presented at the domain boundaries, eachof which can cause scattering. Additionally, the scattering region 15can include masking domains to prevent the laser from penetratingfurther into the group III nitride heterostructure 16. Such maskingdomains can comprise a group III nitride semiconductor layer with alower bandgap and can, for example, incorporate indium.

While certain features described herein are only illustrated in one or asubset of drawings, it is understood that embodiments described hereincan include any combination of two or more of such features. To thisextent, the drawings should not be interpreted as providing mutuallyexclusive embodiments of the invention described herein.

While illustrative aspects of the invention have been shown anddescribed herein primarily in conjunction with a heterostructure for anoptoelectronic device and a method of fabricating such a heterostructureand/or device, it is understood that aspects of the invention furtherprovide various alternative embodiments.

In one embodiment, the invention provides a method of designing and/orfabricating a circuit that includes one or more of the devices designedand fabricated as described herein. To this extent, FIG. 22 shows anillustrative flow diagram for fabricating a circuit 126 according to anembodiment. Initially, a user can utilize a device design system 110 togenerate a device design 112 for a semiconductor device as describedherein. The device design 112 can comprise program code, which can beused by a device fabrication system 114 to generate a set of physicaldevices 116 according to the features defined by the device design 112.Similarly, the device design 112 can be provided to a circuit designsystem 120 (e.g., as an available component for use in circuits), whicha user can utilize to generate a circuit design 122 (e.g., by connectingone or more inputs and outputs to various devices included in acircuit). The circuit design 122 can comprise program code that includesa device designed as described herein. In any event, the circuit design122 and/or one or more physical devices 116 can be provided to a circuitfabrication system 124, which can generate a physical circuit 126according to the circuit design 122. The physical circuit 126 caninclude one or more devices 116 designed as described herein.

In another embodiment, the invention provides a device design system 110for designing and/or a device fabrication system 114 for fabricating asemiconductor device 116 as described herein. In this case, the system110, 114 can comprise a general purpose computing device, which isprogrammed to implement a method of designing and/or fabricating thesemiconductor device 116 as described herein. Similarly, an embodimentof the invention provides a circuit design system 120 for designingand/or a circuit fabrication system 124 for fabricating a circuit 126that includes at least one device 116 designed and/or fabricated asdescribed herein. In this case, the system 120, 124 can comprise ageneral purpose computing device, which is programmed to implement amethod of designing and/or fabricating the circuit 126 including atleast one semiconductor device 116 as described herein.

In still another embodiment, the invention provides a computer programfixed in at least one computer-readable medium, which when executed,enables a computer system to implement a method of designing and/orfabricating a semiconductor device as described herein. For example, thecomputer program can enable the device design system 110 to generate thedevice design 112 as described herein. To this extent, thecomputer-readable medium includes program code, which implements some orall of a process described herein when executed by the computer system.It is understood that the term “computer-readable medium” comprises oneor more of any type of tangible medium of expression, now known or laterdeveloped, from which a stored copy of the program code can beperceived, reproduced, or otherwise communicated by a computing device.

In another embodiment, the invention provides a method of providing acopy of program code, which implements some or all of a processdescribed herein when executed by a computer system. In this case, acomputer system can process a copy of the program code to generate andtransmit, for reception at a second, distinct location, a set of datasignals that has one or more of its characteristics set and/or changedin such a manner as to encode a copy of the program code in the set ofdata signals. Similarly, an embodiment of the invention provides amethod of acquiring a copy of program code that implements some or allof a process described herein, which includes a computer systemreceiving the set of data signals described herein, and translating theset of data signals into a copy of the computer program fixed in atleast one computer-readable medium. In either case, the set of datasignals can be transmitted/received using any type of communicationslink.

In still another embodiment, the invention provides a method ofgenerating a device design system 110 for designing and/or a devicefabrication system 114 for fabricating a semiconductor device asdescribed herein. In this case, a computer system can be obtained (e.g.,created, maintained, made available, etc.) and one or more componentsfor performing a process described herein can be obtained (e.g.,created, purchased, used, modified, etc.) and deployed to the computersystem. To this extent, the deployment can comprise one or more of: (1)installing program code on a computing device; (2) adding one or morecomputing and/or I/O devices to the computer system; (3) incorporatingand/or modifying the computer system to enable it to perform a processdescribed herein; and/or the like.

The foregoing description of various aspects of the invention has beenpresented for purposes of illustration and description. It is notintended to be exhaustive or to limit the invention to the precise formdisclosed, and obviously, many modifications and variations arepossible. Such modifications and variations that may be apparent to anindividual in the art are included within the scope of the invention asdefined by the accompanying claims.

What is claimed is:
 1. A method of fabricating a group III nitrideheterostructure, the method comprising: epitaxially growing asacrificial layer over a substrate structure, wherein the substratestructure includes a substrate and a set of group III nitride layersdirectly on the substrate, wherein the sacrificial layer is growndirectly on a surface of a group III nitride layer in the set of groupIII nitride layers, wherein each of the set of group III nitride layersin the substrate structure have an aluminum molar fraction of at least0.5, and wherein the sacrificial layer includes a plurality ofsublayers, the plurality of sublayers including: an essentiallycontinuous sublayer and a non-continuous sublayer; epitaxially growingthe group III nitride heterostructure directly on the sacrificial layer;and decomposing the sacrificial layer by irradiating the sacrificiallayer with a laser through the substrate structure to at least partiallyrelease the group III nitride heterostructure from the substratestructure, wherein the sacrificial layer is configured to result inabsorption of the irradiated laser light at least an order of magnitudehigher than any of the set of group III nitride layers in the substratestructure.
 2. The method of claim 1, wherein the substrate structureincludes a substrate having a patterned surface on which the set ofgroup III nitride layers are grown.
 3. The method of claim 1, furthercomprising forming a plurality of grooves in the group III nitrideheterostructure prior to the decomposing, wherein each of the pluralityof grooves extends through the group III nitride heterostructure.
 4. Themethod of claim 1, wherein a size of a laser beam generated by the laseris smaller than a lateral area of the group III nitride heterostructure.5. The method of claim 1, wherein the non-continuous layer of thesacrificial layer includes a plurality of columns, each of the pluralityof columns spaced from adjacent columns of the plurality of columns. 6.The method of claim 5, wherein the plurality of columns include aplurality of sub-layers, each sub-layer formed of a different materialfrom an immediately adjacent sub-layer of the plurality of sub-layers.7. The method of claim 1, wherein the non-continuous layer of thesacrificial layer includes a region with a set of vacancies locatedadjacent to the essentially continuous sublayer.
 8. The method of claim1, wherein a first group III nitride layer in the group III nitrideheterostructure immediately adjacent to the sacrificial layer includesn-type doping, and wherein the method further includes forming an n-typeelectrode on a surface of the first group III nitride layer after thedecomposing.
 9. The method of claim 1, further comprising etching thesacrificial layer with hydrofluoric acid, wherein the etching and thedecomposing fully release the group III nitride heterostructure from thesubstrate structure.
 10. The method of claim 1, further comprisingpatterning a surface of the substrate structure prior to growing thesacrificial layer directly on the surface.
 11. The method of claim 1,further comprising thinning the substrate in the substrate structureprior to the decomposing.
 12. The method of claim 1, further comprisingetching the sacrificial layer with hydrofluoric acid, wherein theetching and the decomposing fully release the group III nitrideheterostructure from the substrate structure.
 13. A method offabricating a group III nitride heterostructure, the method comprising:epitaxially growing a sacrificial layer over a substrate structure,wherein the substrate structure includes a substrate and a set of groupIII nitride layers directly on the substrate, wherein the sacrificiallayer is grown directly on a surface of a group III nitride layer in theset of group III nitride layers, and wherein the sacrificial layerincludes a plurality of sublayers, the plurality of sublayers including:an essentially continuous sublayer and a non-continuous sublayer, theessentially continuous sublayer including at most ten percent voids;epitaxially growing the group III nitride heterostructure directly onthe sacrificial layer; and decomposing the sacrificial layer byirradiating the sacrificial layer with a laser through the substratestructure to at least partially release the group III nitrideheterostructure from the substrate structure, wherein the sacrificiallayer is configured to result in absorption of the irradiated laserlight at least an order of magnitude higher than any of the set of groupIII nitride layers in the substrate structure.
 14. The method of claim13, wherein the substrate structure includes a substrate having apatterned surface on which the set of group III nitride layers aregrown.
 15. The method of claim 13, further comprising forming aplurality of grooves in the group III nitride heterostructure prior tothe decomposing, wherein each of the plurality of grooves extendsthrough the group III nitride heterostructure.
 16. The method of claim13, wherein the non-continuous layer of the sacrificial layer includes aplurality of columns, each of the plurality of columns spaced fromadjacent columns of the plurality of columns.
 17. The method of claim16, wherein the plurality of columns include a plurality of sub-layers,each sub-layer formed of a different material from an immediatelyadjacent sub-layer of the plurality of sub-layers.
 18. The method ofclaim 13, wherein the non-continuous layer of the sacrificial layerincludes a region with a set of vacancies located adjacent to theessentially continuous sublayer.
 19. The method of claim 13, furthercomprising thinning the substrate in the substrate structure prior tothe decomposing.
 20. A method of fabricating a group III nitrideheterostructure, the method comprising: epitaxially growing asacrificial layer over a substrate structure, wherein the substratestructure includes a substrate and a set of group III nitride layersdirectly on the substrate, wherein the sacrificial layer is growndirectly on a surface of a group III nitride layer in the set of groupIII nitride layers, and wherein the sacrificial layer includes aplurality of sublayers, the plurality of sublayers including: anessentially continuous sublayer and a non-continuous sublayer, thenon-continuous sublayer including a region with a set of vacancieslocated adjacent to the essentially continuous sublayer and a pluralityof columns located adjacent to the region with the set of vacancies,each of the plurality of columns spaced from adjacent columns of theplurality of columns; epitaxially growing the group III nitrideheterostructure directly on the sacrificial layer; and decomposing thesacrificial layer by irradiating the sacrificial layer with a laserthrough the substrate structure to at least partially release the groupIII nitride heterostructure from the substrate structure, wherein thesacrificial layer is configured to result in absorption of theirradiated laser light at least an order of magnitude higher than any ofthe set of group III nitride layers in the substrate structure.